Breakthrough in research on new exposure modules for UVLED light sources
The reporter learned from the Chongqing Institute of Green and Intelligent Technology of the Chinese Academy of Sciences on the 16th that the institute successfully developed a "2-12-inch UVLED parallel light exposure module" for microelectronic lithography and lithography for PCB, liquid crystal panel and touch screen. Equipped with "5KW, 8KW, 10KW mercury lamp instead of UVLED light source module" series products.
According to the relevant project leader of the Chongqing Institute of Green Intelligent Technology of the Chinese Academy of Sciences, the lithography machine is the key equipment with the largest investment share in LCD panel manufacturing equipment. Its key technology has always been subject to foreign companies, which has restricted the development of the industry. In order to break the situation of foreign monopoly of lithography equipment in the LCD panel industry, the Chongqing Institute of Chinese Academy of Sciences launched a new exposure module based on UVLED light source for the demand for low-cost exposure equipment with advanced technology, energy saving and environmental protection in the field of electronic information, breaking through the LED/ LD optical expansion solution and beam angle transformation theory, LED multi-free-form surface precise light distribution technology, UV-band free-form surface inorganic optical components mass production technology, optical and electrical system integration and other key technologies, successfully developed for microelectronic light Engraved "2-12 inch UVLED parallel light exposure module" and "5KW, 8KW, 10KW mercury lamp instead of UVLED light source module" series for lithography equipment such as PCB, LCD panel and touch screen, product strength and uniformity A number of key indicators are superior to the original factory configuration, and can meet the production of 2um-level lines, product technology has reached the international leading level. At present, the R&D team has reached a cooperation agreement with large enterprises such as Chongqing Founder and Shennan Circuit to cooperate with enterprises to complete the upgrading and upgrading of lithography equipment. There are more than 50,000 lithographic equipments on the market, and the output value will reach more than 5 billion yuan.